High power 2.5D integrated thermoelectric generators combined with microchannels technology

We have developed high power integrated thermoelectric generators (mu TEGs). These mu TEGs are CMOS compatible, i.e. based on polycristalline SiGe materials. These mu TEGs have been processed directly on a silicon interposer. Even if poly-SiGe exhibits low thermoelectric performances at room temperature, the specific design and proposed architecture enable mu TEGs to deliver up to 680 mu W for a temperature difference at 15.5 K. To reach such high power, an original 2.5D structure has been developed and mu channels technology has been associated, below the mu TEG, to dissipate heat coming from the hot side. mu TEGs have been tested in real environment, located below a hot test chip. Such mu TEG performances overtake those from similar state-of-the-art CMOS compatible devices, and pave the way for a potential use in different applications such as sensors power supply or battery charger. (c) 2022 Elsevier Ltd. All rights reserved.