Epitaxial Growth and Applications of Low-Resistivity Phosphorous-Doped Si1-xCxThomas N. Adam,Nicolas Loubet,Alexander Reznicek,Vamsi Paruchuri, Ron Sampson,Devendra K. SadanaMeeting abstracts(2012)引用 0|浏览1暂无评分关键词epitaxial growth,low-resistivity,phosphorous-dopedAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要