THz spectroscopic near-field measurement for nanoscale thermal evanescent waves

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21(2021)

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摘要
Thermally excited evanescent waves generated due to local phenomena of materials is served as a local probe of temperature. The nanoscale near-field spectroscopic information of the thermally excited evanescent waves is applicable to nano-thermography or nano-chemical microscopy. In this study, we demonstrated passive-type scanning near-field optical spectroscopy (SNOS) which detects spectroscopic information of the thermally excited evanescent waves without using any external illuminations. The passive SNOS has been developed with grating-based spectroscopic optics which has over 60 % signal efficiencies. Using the developed passive SNOS, we have achieved detecting the near-field signal on SiC at several different wavelengths in the long-wavelength infrared (LWIR) range.
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关键词
spectroscopic,near-field
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