Fabry-Perot cavity filled with PDMS for high sensitivity gas pressure sensor

13TH INTERNATIONAL PHOTONICS AND OPTOELECTRONICS MEETINGS (POEM 2021)(2022)

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摘要
A novel gas pressure sensor is designed and demonstrated experimentally, which is composed of a Fabry-Perot cavity based on a quartz capillary filled with polydimethylsiloxane (PDMS). The PDMS has excellent elasticity and is an ideal material for gas pressure sensing. The experimental results show that the sensor has a high sensitivity as the gas pressure increases (or decreases). When the gas pressure rises, the maximum sensitivity reaches the -15.95 nm/MPa. When the gas pressure drops, the maximum sensitivity reaches -23.1 nm/MPa. Experimental results show that there are large differences in the sensor sensitivity when the gas pressure rises or decreases, which may be related to the characteristics of the PDMS. The designed sensors have the advantages of simple and compact structure, low cost and high sensitivity, and have certain application prospects in engineering practice.
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关键词
optical fiber sensor, Fabry-Perot interferometer, capillary, Polydimethylsiloxane, gas pressure, gas pressure
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