A novel concept for 5D nanopositioning, nanomeasuring and nanofabrication machines

In recent years, numerous developments in the field of nanopositioning and nanometrology have been realized at the TU-Ilmenau. In particular, the NMM-1 [Gerd Jager, Eberhard Manske, Tino Hausotte, Jans-Joachim Buchner, Nanomessmaschine zur abbefehlerfreien Koordinatenmessung, tm - Technisches Messen, 67(7-8), 2000] as well as the NPMM-200 [Eberhard Manske, Gerd Jager, Tino Hausotte, Felix Balzer, Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolu-tion and highest accuracy in extended macroscopic working areas, euspen's 17th International Conference, 2017] represent a novelty in the field of coordinate measuring technology with nanometer precision in compliance with the Abbe comparator principle [Ernst Abbe, Messaparate fur Physiker, Zeitschrift fur Instrumentenkunde, 10:446-448, 1890]. Based on these achievements, a further step is to measure and fabricate on highly curved, aspherical, or freeform surfaces. Against that background, the following article presents a concept for a two-axis rotary module. This serves as an extension for the NMM-1 and, in addition to the Cartesian measuring volume of 25 mm x 25 mm x 5 mm, allows rotation of the tool over 360 degrees around the vertical axis as well as 60 degrees inclination. This is implemented using a new type of spherical parallel kinematics. With the aid of an interferometric in-situ reference measuring system, the translational position deviations occurring during the rotational movements can be detected. Initial tests on a prototype setup provide proof of the reference measuring system's functionality over the entire addressable angular range.