Diffusion coefficients of carbon, oxygen and nitrogen in silicon melt

Jinping Luo,Chenyang Zhou,Qihang Li,Yunjie Cheng,Lijun Liu

Journal of Crystal Growth（2022）

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摘要

•A review on diffusivity of C, O and N impurities in Si melt is carried out.•Nitrogen diffusion coefficient in Si melt is estimated for the first time.•MD simulated diffusion coefficients are lower than those in most continuum models.

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关键词

A1. Diffusion,A1. Oxygen,A1. Carbon,A1. Nitrogen,B1. Silicon

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