Ultra-low loss silicon nitride ring modulator with low power PZT actuation for photonic control

Jiawei Wang,Kaikai Liu,Mark W. Harrington,Ryan Q. Rudy,Daniel J. Blumenthal

2022 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)（2022）

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摘要

A wafer-scale PZT-actuated ultra-low loss, low-power, stress-optic Si3N4 ring modulator is realized with 7 million Q, 0.03 dB/cm loss, 20 nW power consumption and 20 MHz 3-dB bandwidth, is demonstrated to track a laser. (C) 2022 The Author(s)

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关键词

ultra-low loss silicon nitride ring modulator,low power PZT actuation,photonic control,wafer-scale PZT-actuated ultra-low loss,stress-optic Si3N4 ring modulator,20 nW power consumption,20 MHz 3-dB bandwidth,power 20.0 nW

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