Characterization of Fe-Ni-Pt(Zr) magnetron deposited thin films subjected to low-temperature annealing

V. O. Semin,J. Jiang,R. Y. Umetsu,D. V. Louzguine-Luzgin

Thin Solid Films（2022）

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摘要

•Layered Fe/(Ni,Pt) crystalline, homogeneous crystalline Fe(Ni,Pt) and amorphous Fe-Ni-Pt-Zr.•Nanocrystalline cF4 structure (10–40 nm size) with no texture.•Detailed X-ray diffractometry and transmission electron microscopy analyses.•Diffusion even at 593 K allows complete intermixing of Fe and Ni in layered films.•Fe-Ni-Pt-Zr samples exhibit good hard magnetic properties.

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关键词

Magnetron sputtering,Iron-nickel alloy,Thin film,X-ray diffraction,Transmission electron microscopy,Internal oxidation

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