Nanophotonic Scanning Probes for Nanoscale Imaging of Thermal Conductivity and Interfacial Thermal Conductance

Conference on Lasers and Electro-Optics(2022)

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摘要
Nanophotonic resonator integration and miniaturization decrease detection noise of nanomechanical scanning probe microscopy and increase its throughput. Using pulsed laser excitation, we demonstrate fast imaging (≈500,000× faster than a commercial probe) of thermal properties with 35nm spatial resolution.
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关键词
nanophotonic scanning probes,nanoscale imaging,nanomechanical scanning probe microscopy,pulsed laser excitation,thermal conductivity,interfacial thermal conductance,SU-8 polymer particle,wavelength 35.0 nm
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