Influence of ion-plasma treatment on the surface morphology of epitaxial lead-tin telluride films

Y D Belov,S P Zimin, I I Amirov, V V Naumov

Journal of physics(2022)

引用 0|浏览0
暂无评分
摘要
Abstract The paper discusses the physical aspects of surface modification of Pb 1-x Sn x Te (x = 0.00-0.80) epitaxial films during ion-plasma treatment in argon plasma. Lead–tin telluride films 1−2 μm thick were grown on (111) BaF 2 substrates by molecular beam epitaxy. The ion-plasma treatment of the samples was carried out in a high-density low-pressure radio frequency (RF) inductively coupled plasma at an ion energy of 75 eV. The duration of the process is 240 s. The evolution of the surface morphology of the films and the formation of micro- and nanostructures at different ratios of lead and tin are studied.
更多
查看译文
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要