High Precision Mass Balancing Method for the Fourth Harmonic of Mass Defect of Fused Quartz Hemispherical Resonator Based on Ion Beam Etching Process
IEEE Transactions on Industrial Electronics（2023）
Key words
Vibrations,Resonant frequency,Mathematical models,Etching,Strain,Q-factor,Time-frequency analysis,Defective mass,hemispherical resonator,ion beam etching process,motion equations,parameter identification model
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