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Reconfigurable Transfer Function BST Acoustic Wave Lumped Element Resonator Filters

2021 51st European Microwave Conference (EuMC)(2022)

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摘要
This paper reports on the design, manufacturing and testing of intrinsically-switchable ferroelectric barium strontium titanate (Ba (x) Sr (1-x) TiO 3 , BST) acoustic-wave-lumped-element (AWLR)-based RF filters. For the first time, we demonstrate RF filters with unique reconfigurable transfer function characteristics (all-pass-to-bandstop response and bandpass-to-all-reject response), enhanced fractional bandwidth (FBW), i.e.> kt 2 and operational frequencies as high as 2 GHz. The reconfigurable filter prototypes are directly integrated onto the Si wafer after BST thin film growth and are able to reconfigure their filtering response through application of a DC bias voltage.
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关键词
Barium strontium titanate (BST),bulk acoustic wave (BAW) filters,FBAR,ferroelectrics,acoustic wave resonator,bandstop filter,all-pass network,reconfigurable systems,switchable
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