Heteroepitaxial growth of Lithium Niobate Thin Films on sapphire substrates with different orientations by Pulsed-Laser Deposition

Ihor Pershukov,Jerome Richy,Emma Borel,Elisa Soulat,Marie Bousquet,Florian Dupont,Bertrand Vilquin

2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF)（2022）

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摘要

In this study, epitaxial LiNbO 3 thin films were successfully grown on a - and c-Al 2 O 3 substrates by Pulsed Laser Deposition (PLD). In order to control the film crystallinity and chemical composition, the influence of different growth parameters, such as substrate temperature, oxygen pressure, and target composition, were studied. The physical and chemical properties of the as-deposited LiNbO 3 layers were characterized.

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关键词

pulsed laser deposition,ferroelectric thin film,lithium niobate,epitaxy.

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