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Effects of interlayer bias voltage on the mechanical properties of tetrahedral amorphous carbon films

Keliang Wang,Hui Zhou,Kaifeng Zhang,Binhua Gui,Xingguo Feng,Shengzhu Cao,Yanshuai Zhang, Bingwen Teng

Vacuum（2022）

Cited 4|Views2
Key words
Tetrahedral amorphous carbon(ta-C),Ti interlayer deposition bias voltage,Molecular dynamics simulation,Adhesion property
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