In situ investigation of aluminum oxide under irradiation by electron beam at atomic-scale

Weiwei Xia, Yu Wang,Mingxing Gong,Lianyang Chen,Mengqian Zhang

Materials Letters（2023）

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摘要

•The native Al2O3 layer was investigated under electron irradiation by in situ TEM.•Electrons can trigger the formation of nanocrystals from amorphous substrate.•Both crystalline and amorphous Al2O3 were removed by electron beam etching.•New oxides layer would cover on the exposed fresh metal Al surface again.

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关键词

Aluminum oxide,Irradiation,In-situ TEM,Electron microscopy,Microstructure,Atomic

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