One-dimensional and two-dimensional Er3+-doped germanate glass waveguides by combination of He plus ion implantation and precise diamond blade dicing

Compact and miniaturized Er3+-doped waveguide structure is an important research direction in integrated optics. In this work, the Er3+-doped germanate glass was bombarded by a 400-keV He+ ion beam with a fluence of 6.0 x 1016 ions/cm2 for the formation of the one-dimensional waveguide in a vacuum. Subsequently, the precise diamond blade with a rotating velocity of 20,000 rpm and a cutting speed of 0.1 mm/s was applied to dice the surface of the one-dimensional waveguide for the fabrication of the two-dimensional structure. The formation mechanism and the refractive index profile of the one-dimensional waveguide were studied by the SRIM 2013 and the RCM, respectively. The electromagnetic field profiles for the fundamental modes of both one-dimensional and two-dimensional waveguides were measured by the end-face coupling method. It presents some useful information in the field of fabrication and characterization of optical waveguides for active photonic applications.