Optical hydrogen sensing with high-Q guided-mode resonance of Al 2 O 3 /WO 3 /Pd nanostructure

Scientific Reports(2023)

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摘要
Nanostructure based on a dielectric grating (Al 2 O 3 ), gasochromic oxide (WO 3 ) and catalyst (Pd) is proposed as a hydrogen sensor working at the room temperature. In the fabricated structure, the Pd catalyst film was as thin as 1 nm that allowed a significant decrease in the optical absorption. A high-Q guided-mode resonance was observed in a transmission spectrum at normal incidence and was utilized for hydrogen detection. The spectra were measured at 0–0.12
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Optical sensors,Sensors and biosensors,Science,Humanities and Social Sciences,multidisciplinary
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