Energy-efficient physical vapor deposition of dense and hard Ti-Al-W-N coatings deposited under industrial conditions

Materials & Design(2023)

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摘要
•(Ti1-yAly)1-xWxN coatings are grown by W-HiPIMS/TiAl-DCMS under industrial conditions.•Conventional resistive heating can be replaced by high-mass metal ion irradiation.•The densification of the coatings controlled by the W ion energy and W ion dose per deposited metal atom.•The energy consumption during the pre-heating and coating stage is lowered by 70 % and 62 %, respectively.
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关键词
PVD,Energy-efficient,Industrial,Densification,Ion-irradiation
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