Sputtering Al2O3 enhanced bandgap engineering for integrated photonic devices

Mohammad Kaleem,Sajid Nazir, Shaista Jabeen,Hamid Turab Mirza, Shahrukh Agha,Aadil Raza

Optics & Laser Technology（2023）

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摘要

•• Provides superior results of Al2O3-QWI technique to engineer the bandgap shift of InGaAsP/InP QWs laser microstructures with a very high PL intensity.•• Demonstrates the application of the Al2O3-QWI technique for fabrication of low loss waveguides.•• Demonstrates the application of the Al2O3-QWI technique for fabrication of lower threshold current FP laser devices and analyzed emission spectra.•• We present good quality of the laser microstructure after Al2O3-QWI technique.

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关键词

Sputtering,Bandgap shifted,Photonic Integration,Quantum Well Intermixing (QWI),Photoluminescence (PL)

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