Modeling and Analytical Description of Parasitic Probe Effects in Measurements of Conductor-Backed Coplanar Waveguides

On-wafer measurements are of fundamental importance to the characterization of active and passive devices at millimetre-wave frequencies. They have been commonly known to be ambitious and challenging due to the occurrence of parasitic effects originating from probes, multimode propagation, crosstalk between adjacent structures and radiation. While a lot of investigations have been performed for conventional coplanar waveguides (CPW) measured on ceramic chucks, the parasitic effects occuring in conductor-backed CPWs (CB-CPWs) have not been fully understood yet. Therefore, this paper presents a thorough study for CB-CPWs based on electromagnetic simulations. Additionally, this paper proposes an analytical description accounting for the probe geometries to predict the occurrence of resonance effects due to the propagation of the parallel-plate-line (PPL) mode. For the first time, a new analytical description including the effects of the probe geometries is presented and validated by both measurements and simulations.