Ultralow‐Power Piezo‐Optomechanically Tuning on CMOS‐Compatible Integrated Silicon‐Hafnium‐Oxide Platform (Laser Photonics Rev. 17(2)/2023)

Photonic Integrated Circuits In article number 2200248, Yong Zhang, Xiuyan Li, Yikai Su, and colleagues experimentally demonstrate ultra-low-power piezo-optomechanical tuning on a complementary metal-oxide-semiconductor (CMOS)-compatible integrated silicon-hafnium-oxide platform. By introducing Zr-doped HfO2 thin film as an active optical and piezoelectric layer, the tunable silicon-hafnium-oxide hybrid microring is capable of linear bidirectional tuning with ultra-low power consumption. The hybrid silicon-hafnium-oxide technology with CMOS compatibility advances the field of ultra-low-power integrated photonic devices and can find applications in optical communications, computing, and spaces under cryogenic temperatures.