Growth of non-polar m-plane GaN pseudo-substrates by Molecular beam epitaxy

JOURNAL OF CRYSTAL GROWTH(2023)

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摘要
Non-polar m-plane GaN films were grown by Plasma Assisted Molecular Beam Epitaxy on & gamma;-LiAlO2 (100) sub-strates by a controlled coalescence of GaN nanocolumns obtained by a two-step process including a top-down nanopillars etching from a GaN buffer and a subsequent bottom-up overgrowth. Transmission electron micro-scopy data show a significant reduction of extended defects density in the coalesced film as compared to the initial GaN buffer, most likely due to a filter effect by the regrowth process on the nanopillars inclined walls. Low temperature photoluminescence spectra back this reduction by a strong intensity decrease of the stacking faults fingerprint emission peaks, while a very intense donor-bound excitonic emission at 3.472 eV, 2.8 meV wide, becomes dominant.
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关键词
gan,molecular beam epitaxy,non-polar,m-plane,pseudo-substrates
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