Growth of nanostructured cobalt thin film at oblique angle deposition
ST PETERSBURG POLYTECHNIC UNIVERSITY JOURNAL-PHYSICS AND MATHEMATICS(2022)
摘要
Nanocolumnar Co thin films growth by oblique angle deposition on Si substrate is experimentally studied. Formation of regular arrays of vertical Co nanocolumns has been observed at incidence angles more than 80 degrees with rotation of substrate. Such films might be perspective material for applications as a magnetic recording media for next generations of hard disks.
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关键词
Co thin films, nanocolumns, oblique angle deposition
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