Freely Suspended Platinum Diselenide Membranes without Polymer Support for Piezoresistive Pressure Sensing.
DRC(2023)
摘要
Platinum diselenide (PtSe
2
) is a layered two-dimensional (2D) material with outstanding electronic and piezoresistive properties
[1]–[3]
. It has demonstrated its potential for membrane-based pressure sensor devices, where poly(methyl methacrylate) (PMMA) supported and suspended the PtSe2 membranes
[4]
. The impact of the polymer support layer on the response of the suspended 2D material is still under investigation
[5]
. To study the strain and the piezoresistive behavior, we fabricated and analyzed devices based on suspended PtSe
2
membranes with and without polymer support.
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关键词
electronic properties,membrane suspension,membrane-based pressure sensor devices,piezoresistive pressure sensing,piezoresistive properties,PMMA,poly(methyl methacrylate),polymer support layer,suspended 2D material,suspended platinum diselenide membranes,two-dimensional material
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