An industrially compatible process for the fabrication of superconducting monocrystalline Si films

Paul Dumas,Mathieu Opprecht,Sebastien Kerdiles,Francois Lefloch,Fabrice Nemouchi

2023 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC AND IEEE MATERIALS FOR ADVANCED METALLIZATION CONFERENCE, MAM, IITC/MAM（2023）

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摘要

We report an industrially compatible process for the fabrication of superconducting monocrystalline Si films (similar to 30 nm thick). Increasing the boron implant energy by only one keV enables superconductivity in monocrystalline films and makes the critical temperature increase up to 390 mK. Time-Resolved-Reflectometry appears as an adequate in-line characterization to identify the most promising process conditions.

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关键词

Superconductivity, silicon, laser anneal

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