Enhance Gate Reliability and Threshold Voltage Stability of p-GaN Gate High-Electron-Mobility Transistors

2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM(2023)

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摘要
Gate reliability and threshold voltage instability issues were investigated in the enhancement-mode pGaN gate high-electron-mobility transistors (HEMTs). A n- GaN/p- GaN gate structure is proposed to effectively reduce the gate leakage and enlarge the gate swing of the p-GaN gate HEMTs. The VTH tunability and stability of the p-GaN gate HEMTs are also systematically investigated. With a p-FET bridge, wide range VTH can be achieved, as well as eliminated hole-deficiency-induced VTH shifts.
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关键词
GaN HEMT, p-GaN, gate reliability, VTH stability
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