Evolution of the Growth of a Micro-Nano Crystalline Diamond Film on an Axial Carbide Tool Model in Microwave Plasma

Conformal multilayer micro-nanocrystalline diamond coatings were grown on substrates of a hard alloy with 9% Co with a high aspect number in microwave plasma from gas mixtures CH4/H2 and CH4/H2/N2. The substrates were of a cylindrical axial tool model with a size ratio: d = 12 mm to l = 75 mm. An original tool holder made of molybdenum, in the form of a sector of the excessive ring with the axis of the hole parallel to the central conductive platform, protects part of the substrate from heating due to the edge effect of plasma. The uniformity of heating of the growth part, which is located inside the excessive ring, is calculated using mathematical modeling and is provided by rotation at a speed of at least 12 rpm, which ensures the uniformity of the coating. The average grain size of the nanocrystalline film measured along the cylinder forming was 41 nm.