High-concentration F-doped ZnO thin films prepared via femtosecond-laser hyperdoping

Yaoyao Liu,Xinda Jiang,Qiang Wu,Jianghong Yao,Jingjun Xu

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

High-concentration F-doped ZnO thin films with an atomic dopant percentage of 8.3 at.% were prepared for the first time using the femtosecond-laser hyperdoping technique.

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