A new route to apply nanometric alumina coating on powders by fluidized bed chemical vapor deposition

Chemical Engineering Journal Advances(2023)

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摘要
•Development of a new route to deposit Al2O3 films on powders by fluidized bed CVD.•Use of the single source aluminum tri-isopropoxide precursor between 400 and 500 °C.•Demonstration of a stable and reproducible behavior of the coating process.•Obtaining of continuous and conformal nanometric coatings of stoichiometric alumina.•Possibility to conformally coat a wide range of oxygen sensitive powders.
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关键词
nanometric alumina,chemical vapor deposition
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