Development of PMUT Array Packaging from Characterisation Prototypes to Customer Samples

PMUT (Piezoelectric Micromachined Ultrasonic Transducers) can be used in a wide number ofmedical and industrial applications, from high-end ultrasound scanning which requires a large array of membranes and interconnects to the ASIC driver/receiver, to therapeutic ultrasound and energy delivery which require a small number of membranes/interconnects. Different packaging needs have been required during the development program for the characterisation of the PMUT devices and the requirements of the different prospective product niches. In th is paper, the different packages designed, assembled, and used during the development of the PMUT from the first characterisation packages to the 1st prototype packages that will be used for high resolution ultrasound imaging customer samples are described