Terahertz and dc conductivity of pyrolyzed photoresist films

Justinas Jorudas,Hamza Rehman,Georgy Fedorov,Maria Cojocari,Petri Karvinen,Andrzej Urbanowicz,Daniil Pashnev,Irmantas Kagalynas,Yuri Svirko,Polina Kuzhir

2023 48th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)（2023）

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摘要

Pyrolyzed photoresist films (PPFs), of 150 nm thickness were developed via vacuum annealing of a photoresist. The high frequency conductivity of PPF was investigated via contactless THz time-domain spectroscopy (TDS). The PPF sheet resistance was found to be comparable to that of CVD graphene. Our findings open a path for simple and scalable fabrication of graphitic-film-based high frequency nanocircuits.

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关键词

C/el,contactless THz time-domain spectra,CVD graphene,dc conductivity,graphitic-film-based high frequency nanocircuit,high frequency conductivity,PPF sheet resistance,pyrolyzed photoresist films,vacuum annealing

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