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Silicon Nitride Subwavelength Grating Metamaterial Waveguides Functionalized with Atomic Layer Deposited Al2O3 Cladding

Cameron M. Naraine,Batoul Hashemi, Nicholas A. Hoffman,Jeffrey S. Price,Andrew P. Knights,David J. H. Emslie,Jens H. Schmid,Pavel Cheben,Jonathan D. B. Bradley

2023 Photonics North (PN)（2023）

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Abstract
We report on subwavelength grating metamaterial waveguides fabricated on a rapid prototyping silicon nitride foundry platform coated in aluminum oxide grown using a post-process atomic layer deposition system. We discuss the design of the metamaterial waveguides and report experimental results for the hybrid waveguide devices.
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Key words
subwavelength gratings,metamaterials,atomic layer deposition,aluminum oxide,silicon nitride,integrated photonics
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