Hydrogen plasma treatment of MoS2 with graphene protection
2019 Conference on Lasers and Electro-Optics (CLEO)(2019)
摘要
Hydrogen plasma treatment can create defects such as sulfur vacancies in single layer MoS
2
. A single layer graphene's protection can effectively reduce the defects formation as confirmed by Raman spectroscopy. © 2019 The Author(s)
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关键词
Raman spectroscopy,defects formation,single layer MoS2,graphene protection,single layer graphene,sulfur vacancies,hydrogen plasma treatment,MoS2,C
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