Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation

Alexander Senichev,Zachariah O. Martin,Yongqiang Wang,Han Htoon,Alexei S. Lagutchev,Alexandra Boltasseva,Vladimir M. Shalaev

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

We report on the generation of single-photon emitters in aluminum nitride films through Zr-ion implantation, which was predicted to form optically addressable spin defects. We studied implantation conditions, post-implantation procedures, and properties of resulting emitters.

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