Silicon nitride electro-optic modulators enabled by heterogeneous integration of barium titanate films
2023 Conference on Lasers and Electro-Optics (CLEO)（2023）
摘要
We demonstrate electro-optic modulators on a low-loss silicon nitride platform by heterogeneously integrating crystalline barium titanate membranes.
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关键词
(130.4110) Modulators,(130.0250) Optoelectronics,(160.4670) Optical materials
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