Pillar-Based High-Yield Heterogeneous Integration of Lithium Niobate and Gallium Phosphide Thin Films

Tom Vandekerckhove,Tom Vanackere,Jasper De Witte,Stijn Cuyvers,Luis Reis,Maximilien Billet,Günther Roelkens,Stéphane Clemmen,Bart Kuyken

2023 Conference on Lasers and Electro-Optics (CLEO)（2023）

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摘要

Several established photonic platforms lack a nonzero Pockels and nonlinear coefficient. We developed a micro-transfer printing method to heterogeneously integrate thin-film lithium niobate and gallium phosphide with an experimentally shown transfer yield of near-unity.

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