Suppression of Transverse Spurious Modes on 30°YX-Cut Lithium Niobate-On-Insulator SH0 Resonators Through Electrode Rhomboidal Apodization
2023 IEEE International Ultrasonics Symposium (IUS)(2023)
摘要
This work studies the effect of introducing a rhomboidal apodization pattern in the interdigital transducers (IDT) of 30°YX-cut Lithium Niobate-On-Insulator (LNOI) Shear Horizontal SH
0
resonators. To demonstrate the effect of IDT apodization, this work presents a set of manufactured resonators with different apodization ratios and compares their performance with non-apodized resonators.
更多查看译文
关键词
Acoustic resonator,apodization,lithium niobate on insulator,piezo on insulator,shear-horizontal mode,rhomboid
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要