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Suppression of Transverse Spurious Modes on 30°YX-Cut Lithium Niobate-On-Insulator SH0 Resonators Through Electrode Rhomboidal Apodization

2023 IEEE International Ultrasonics Symposium (IUS)(2023)

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摘要
This work studies the effect of introducing a rhomboidal apodization pattern in the interdigital transducers (IDT) of 30°YX-cut Lithium Niobate-On-Insulator (LNOI) Shear Horizontal SH 0 resonators. To demonstrate the effect of IDT apodization, this work presents a set of manufactured resonators with different apodization ratios and compares their performance with non-apodized resonators.
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关键词
Acoustic resonator,apodization,lithium niobate on insulator,piezo on insulator,shear-horizontal mode,rhomboid
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