Remote O2 plasma functionalization for integration of uniform high-k dielectrics on large area synthesized few-layer MoSe2

Jae‐Hun Jeong,Yoon Ho Choi, Dambi Park, Leo Cho, Dong‐Hyeok Lim, Youngseo An, So Young Yi,Hyoungsub Kim, Keunje Yoo, Mann–Ho Cho

한국진공학회 학술발표회초록집(2016)

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o2,few-layer
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