Remote O2 plasma functionalization for integration of uniform high-k dielectrics on large area synthesized few-layer MoSe2Jae‐Hun Jeong,Yoon Ho Choi, Dambi Park, Leo Cho, Dong‐Hyeok Lim, Youngseo An, So Young Yi,Hyoungsub Kim, Keunje Yoo, Mann–Ho Cho한국진공학회 학술발표회초록집(2016)引用 0|浏览0暂无评分关键词o2,few-layerAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要