The Early Work on Sputtering Formation of Amorphous IGZO (In-Ga-Zn-O) Channel and SnO Channel TFTs

Hisato Yabuta, Ryuichi Hayashi,Hideya Kumomi

IDW(2022)

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关键词
amorphous igzo,sno channel tfts,sputtering formation,in-ga-zn-o
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