Solid State 2-mm Laser Drivers for EUV Lithography

Brendan Reagan,Thomas C. Galvin,Issa Tamer,Emily Sistrunk, C. W. Siders,Thomas Spinka

SPIE eBooks（2023）

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摘要

In this chapter, we first discuss the current state-of-the-art of high-average-power SSL technology, followed by a review of demonstrated lasers at wavelengths near λ ≈ 2 μm. Finally, the potential application of the Tm:YLF-based BAT laser technology for driving an EUVL source is presented.

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laser,drivers

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