Integrated 4-terminal Single-Contact Nanoelectromechanical Relays Implemented in a Silicon-On-Insulator Foundry Process

Yingying Li,Elliott Worsey,Simon J. Bleiker,Pierre Edinger, Mukesh Kulsreshath,Qi Tang,Alain Yuji Takabayashi,Niels Quack,Peter Verheyen,Wim Bogaerts,Kristinn B. Gylfason,Dinesh Pamunuwa,Frank Niklaus

Nanoscale（2023）

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摘要

Silicon 4-T NEM relays, patterned in front-end-of-line processing and monolithically integrated with back-end-of-line metallic interconnects manufactured in a commercial foundry platform.

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关键词

single-contact,silicon-on-insulator

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