Enhancement of The Quality Factor of Thin-Film-Piezoelectric-on-Si MEMS Resonator Using Phononic Crystals and Circular Suspended Frame Structure

Abstract This paper reports enhancing the anchor quality factor of a thin-film-piezoelectric-on-silicon MEMS resonator using a combination of energy-preserving suspended circular frame and Aisha-phononic crystals. The circular frame work as a mechanical vibration isolator among the anchors and resonator body, at the same time Aisha-PnC prohibits the acoustic wave from escaping to anchors by generating a bandgap. The results show circular frame structure with Aisha-PnC resonator lowers insertion loss from 4.1 dB to 0.2 dB, improves anchor quality factor from 14,215 to 74,141 and Q unloaded from 3,732 to 161,086 achieving 5.3-fold and 43-fold enhancements respectively.