Investigation of vacuum measurement by nano-gap device
ELECTRONICS AND COMMUNICATIONS IN JAPAN(2024)
摘要
Advances in microfabrication technology have enabled electron beam lithography (EB lithography) systems to produce microfabrication on the order of 10 of nanometers. Using this technology, we have fabricated nanogap electrodes that can generate large electric fields at low voltages. The gap between the tips of the fabricated electrodes is 100 nm, and the curvature of each tip is 50 nm. The device was confirmed to work as an electronic vacuum gauge, the device successfully measured vacuum from 10-3 to 1 Pa at the electrode voltage of 3 V.
更多查看译文
关键词
cold cathode field emission,electron beam lithography,nanogap,vacuum
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要