A Novel Inverse-L Buried GaN Current-Aperture Vertical Electron Transistors
2023 Cross Strait Radio Science and Wireless Technology Conference (CSRSWTC)(2023)
摘要
In order to overcome the problem of current collapse in transverse GaN devices and produce higher breakdown voltage power devices, research on vertical GaN-based power devices is crucial. This paper suggests an AlGaN/GaN current-aperture vertical electronic transistor (CAVET) with an inverted L-shaped buried layer structure. Through simulation and in-depth study of the proposed device, by changing the buried length and droping concentration and the buffer droping concentration, the results show that the inverted L-shaped buried CAVET enhances breakdown voltage to 2536 V. And the device achieving the figure of merit of
$\mathbf{3}.\mathbf{3}\ \mathbf{GW}/\mathbf{cm}^{\mathbf{2}}$
, which are 148% higher than traditional structure device, but the on-resistance is only
$\mathbf{1}.\mathbf{95}\ \mathbf{m}\mathbf{\Omega}\cdot \mathbf{cm}^{\mathbf{2}}$
.
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关键词
GaN,transistor,pressure resistance characteristic,buried layer structur
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