High-coherence Superconducting Qubits Made Using Industry-Standard, Advanced Semiconductor Manufacturing

The development of superconducting qubit technology has shown great potentialfor the construction of practical quantum computers. As the complexity ofquantum processors continues to grow, the need for stringent fabricationtolerances becomes increasingly critical. Utilizing advanced industrialfabrication processes could facilitate the necessary level of fabricationcontrol to support the continued scaling of quantum processors. However, theseindustrial processes are currently not optimized to produce high coherencedevices, nor are they a priori compatible with the commonly used approaches tomake superconducting qubits. In this work, we demonstrate for the first timesuperconducting transmon qubits manufactured in a 300 mm CMOS pilot line, usingindustrial fabrication methods, with resulting relaxation and coherence timesalready exceeding 100 microseconds. We show across-wafer, large-scalestatistics studies of coherence, yield, variability, and aging that confirm thevalidity of our approach. The presented industry-scale fabrication process,using exclusively optical lithography and reactive ion etching, showsperformance and yield similar to the conventional laboratory-style techniquesutilizing metal lift-off, angled evaporation, and electron-beam writing.Moreover, it offers potential for further upscaling by includingthree-dimensional integration and additional process optimization usingadvanced metrology and judicious choice of processing parameters and splits.This result marks the advent of more reliable, large-scale, trulyCMOS-compatible fabrication of superconducting quantum computing processors.