Crack-free growth of UVC LEDs on 6-inch sapphire substrates using face-to-face high-temperature annealed AlN by production scale MOCVD

Junya Yoshinaga, Keitaro Ikejiri, Shuichi Koseki,Kenjiro Uesugi,Hideto Miyake

Gallium Nitride Materials and Devices XIX(2024)

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