Development of a Small-Footprint 50 MHz Linear Array: Fabrication and Micro-Ultrasound Imaging Demonstration
Sensors（2024）
关键词
high-frequency ultrasound,transducer array,fine pitch,flexible-circuit cabling,electrical characterization,acoustic characterization,miniaturization,polyimide,electrode patterning,laser machining,excimer laser,metal deposition,high-density interconnect
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