Wet-etching fabrication of flexible and transparent silicon frameworks for imperceptible wearable electronics

Tingyu Wei,Yihao Shi, Bingchang Zhang,Yu Ding, Jiahao Qin, Xinyue Hu,Jia Yu, Ruiyuan Liu,Xiaohong Zhang

Journal of Materials Chemistry C（2024）

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摘要

This work proposes a method of low-cost alkali etching to fabricate single-crystalline silicon frameworks, which will promote the research and application of silicon-based imperceptible wearable electronics.

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