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Monolithic Back-End-of-line Integration of Phase Change Materials into Foundry-Manufactured Silicon Photonics

Maoliang Wei,Kai Xu,Bo Tang,Junying Li,Yiting Yun,Peng Zhang,Yingchun Wu,Kangjian Bao,Kunhao Lei,Zequn Chen,Hui Ma,Chunlei Sun,Ruonan Liu,Ming Li,Lan Li,Hongtao Lin

NATURE COMMUNICATIONS（2024）

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Key words
Phase Change Materials,Silicon Photonics,Photonic Applications
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