High Dynamic Wavefront Stability Control for High-Uniformity Periodic Microstructure Fabrication

Zijian Zhong, Jingwen Li, Tianshi Lu,Xinghui Li

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY（2025）

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Key words

Microstructure fabrication,Interference lithography,Wavefront control,Diffraction gratings

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